Silicon Carbide Components For Semiconductor Equipment

Silicon Carbide Components For Semiconductor Equipment

HuaCera silicon carbide has a thermal expansion coefficient that matches that of silicon,and possesses a high elastic modulus, high rigidity, chemical inertness, extremely high wear resistance, and dimensional thermal stability.
Using low-cost forming methods such as dry pressing and cold isostatic pressing,while maintaining a high level of purity (greater than 99.9%), it is an ideal choice for equipment used in semiconductor lithography, wafer metrology, bonding, and cleaning
processes.
Main applications include: vacuum chucks, precision components (guide rails, platforms, bases), silicon carbide mirrors, carriers, robotic arms, and other structural components, and can also be used as high-temperature furnace tubes.

Henan ZG Industrial Products Co. Ltd. was founded by specialists of leading industrial institutes in Zhengzhou city, China in 2007.
Our company manufactures, complex develops, supplies, introduces and upgrades products from technical ceramics, heating elements and graphite. We provide services for the manufacture, repair and renovation of special high-temperature equipment as well. In addition, our company provides services for R&D, analytical research within our specialization.
We have established contacts with the world’s leading and domestic manufacturers of ceramic and heating elements, leading industry institutes and track all the latest trends in this field.
The introduction of ceramic and heating elements in production requires a special study of each case, taking into account technological and market nuances. The specialists of our company have all the necessary experience for the most complete solution of the customer’s problem and developing an optimal offer.
Among our customers are chemical, petrochemical, oil refining, oil and gas, mining, mining and concentrating, paper, metallurgy, power, electrical, electronic, glass and other industries.
We will be glad to answer all your questions.